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질소이온 주입된 질화텅스텐박막의 구리배선용 확산방지막 특성 .

Authors

Kim Yong Tae; 권철순; 김동준; Min Suk-Ki

Citation

제 2 회 한국반도체학술대회, pp.?

URI

https://pubs.kist.re.kr/handle/201004/112024

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KIST Conference Paper > Others

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