Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim Yong Tae | - |
| dc.contributor.author | 권철순 | - |
| dc.contributor.author | 김동준 | - |
| dc.contributor.author | Min Suk-Ki | - |
| dc.date.accessioned | 2024-01-13T22:04:25Z | - |
| dc.date.available | 2024-01-13T22:04:25Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/112024 | - |
| dc.language | Korean | - |
| dc.title | 질소이온 주입된 질화텅스텐박막의 구리배선용 확산방지막 특성 . | - |
| dc.type | Conference | - |
| dc.description.journalClass | 2 | - |
| dc.identifier.bibliographicCitation | 제 2 회 한국반도체학술대회, pp.? | - |
| dc.citation.title | 제 2 회 한국반도체학술대회 | - |
| dc.citation.startPage | ? | - |
| dc.citation.endPage | ? | - |
| dc.citation.conferencePlace | KO | - |
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