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습식 에칭된 Si 표면에 증착된 SixNy 박막의 특성 평가

Authors

Jung Jae Hoon; Ju Byeong Kwon; 고창기; 박흥우; LEE NAM YANG; 장진; OH MYUNG HWAN

Issue Date

1995-01

Citation

제2회 한국반도체학술대회, 한국과학기술원, pp.69 - 70

URI

https://pubs.kist.re.kr/handle/201004/112028

Appears in Collections:

KIST Conference Paper > Others

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