DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorJung Jae Hoon-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.author고창기-
dc.contributor.author박흥우-
dc.contributor.authorLEE NAM YANG-
dc.contributor.author장진-
dc.contributor.authorOH MYUNG HWAN-
dc.date.accessioned2024-01-13T22:04:29Z-
dc.date.available2024-01-13T22:04:29Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/112028-
dc.title.alternative습식 에칭된 Si 표면에 증착된 SixNy 박막의 특성 평가-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제2회 한국반도체학술대회, 한국과학기술원, pp.69 - 70-
dc.citation.title제2회 한국반도체학술대회, 한국과학기술원-
dc.citation.startPage69-
dc.citation.endPage70-
dc.citation.conferencePlaceKO-
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