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Other Titles

구리확산 방지막으로서 TiW/WNx 이중층의 열적안정성에 관한 연구

Authors

Kim Yong Tae; 김동준; 박종완; 권철순; Min Suk-Ki

Citation

한국물리학회 제69회 학술논문발표회, pp.?

URI

https://pubs.kist.re.kr/handle/201004/112239

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KIST Conference Paper > Others

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