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Dependence of carbon incorporation on crystallographic orientation of GaAs and AlGaAs grown by metalorganic chemical vapor deposition using CBr4

Title: Dependence of carbon incorporation on crystallographic orientation of GaAs and AlGaAs grown by metalorganic chemical vapor deposition using CBr4

Authors: 손창식; 김성일; 김용; 박영균; 김은규; 민석기; 최인훈

Keywords: GaAs; carbon doping; carbon tetrabromide; metalorganic chemical vapor deposition

Issue Date: 1997-08

Publisher: Journal of applied physics.

Citation: VOL 82, NO 3, 1205-1207

URI: https://pubs.kist.re.kr/handle/201004/11227

Appears in Collections:: KIST Publication > Article

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