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Other Titles

MOCVD 기법으로 제작한 Al0.05Ga0.95As/GaAs/Al0.05Ga0.95As embedded 도파로의 전파손실 측정

Authors

KPARK KYUNG HYUN; Byun Young Tae; KIM YOUN; Kim Sun Ho; CHOI SANG SAM

Citation

한국물리학회 논문초록집, v.11, no.2, pp.326

Keywords

MOCVD 기법; embedded 광도파로; 유효굴절률 방법; RIE(reactive ion etchin) 식각; cut-back 방법; 전파손실

URI

https://pubs.kist.re.kr/handle/201004/112295

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KIST Conference Paper > Others

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