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Consideration on the various phenomena appeared at bonding interface in fusion-bonded silicon wafer pairs

Other Titles

용융접합된 규소 기판쌍에 있어서 접합 계면에 발생하는 제 현상들의 고찰

Authors

방준호; Ju Byeong Kwon; OH MYUNG HWAN; 박종완

Citation

전기학회 하계학술대회, 설악레저텔, pp.1057 - 1059

URI

https://pubs.kist.re.kr/handle/201004/112362

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KIST Conference Paper > Others

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