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A study on the instability in PECVD-SiNx/InP structure utilizing capacatance and conductnace techniques.

Authors

KANG KWANG NHAM; Lee Jung Il; Han Il Ki; LEE MYOUNG BOG

Citation

한국물리학회 학술발표회 , 전북대, pp.?

Keywords

PECVD

URI

https://pubs.kist.re.kr/handle/201004/112557

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KIST Conference Paper > Others

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