RIE 로 처리된 GaAs 표면의 전기적 특성연구 .

Authors
Kim Seong IlHan Il KiChoi Won JunLee Jung IlKANG KWANG NHAM조준환임한조Yoo Jong LeeLEE MYOUNG BOG
Citation
대한 전자공학회 추계 종합학술대회 논문집, v.v. 13, no.no. 2, pp.140 - 143
Keywords
MOCVD; GaAs; RIE
URI
https://pubs.kist.re.kr/handle/201004/112621
Appears in Collections:
KIST Conference Paper > Others
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