Insulating layer grown by PECVD for InP MISFET.

Authors
KANG KWANG NHAMLee Jung IlChoi Won JunHan Il KiYoo Jong LeeLEE MYOUNG BOG조준환
Citation
'90 레이저 광기술 하계 Workshop 논문집, pp.123 - ?
Keywords
InP MISFET
URI
https://pubs.kist.re.kr/handle/201004/112634
Appears in Collections:
KIST Conference Paper > Others
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