DSpace at KIST: The backside gettering of OSF using CVD-BN

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DC Field	Value	Language
dc.contributor.author	Ju Byeong Kwon	-
dc.contributor.author	홍순관	-
dc.contributor.author	Rhee Jae Seong	-
dc.contributor.author	김철주	-
dc.date.accessioned	2024-01-13T23:34:09Z	-
dc.date.available	2024-01-13T23:34:09Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/112806	-
dc.language	English	-
dc.title	The backside gettering of OSF using CVD-BN	-
dc.title.alternative	CVD-BN을 이용한 OSF의 backside gettering	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	전기재료 반도체 및 CAD 학술대회 논문집, 홍익대, pp.69 - 72	-
dc.citation.title	전기재료 반도체 및 CAD 학술대회 논문집, 홍익대	-
dc.citation.startPage	69	-
dc.citation.endPage	72	-
dc.citation.conferencePlace	KO	-

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