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Direct bonding between spacer and field emitter array using an electron-beam evaporated interlayer

Title: Direct bonding between spacer and field emitter array using an electron-beam evaporated interlayer

Authors: 박흥우; 주병권; 이윤희; 강인병; N. Samaan; M. R. Haskard; 박정호; 오명환

Keywords: MEMS; FED; wafer bonding

Issue Date: 1997-03

Publisher: SPIE proceedings

Citation: VOL 3046, 328-335

URI: https://pubs.kist.re.kr/handle/201004/11322

Appears in Collections:: KIST Publication > Conference Paper

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