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Synthesis of diamond thick films by DC PACVD

Title
Synthesis of diamond thick films by DC PACVD
Authors
이재갑; 이욱성; 백영준; 은광용
Keywords
diamond deposition; DC PACVD; thick film; CVD diamond; methane concentration; morphology; FWHM
Issue Date
1994-01
Publisher
Advances in new diamond science and technology
Citation
, 69-72
URI
https://pubs.kist.re.kr/handle/201004/11347
Appears in Collections:
KIST Publication > Conference Paper
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