On-chip temperature sensor using high-Q Si3N4 micro-disk resonator

Abstract

Silicon nitride (Si3N4) has attracted numerous research interests in the field of photonic integrated circuit due to its CMOS compatibility, broad transparency window, and strong optical nonlinearity. We demonstrate high-Q Si3N4 micro-disk resonator for on-chip temperature sensing device. The micro-disk resonator exhibits Q-factor up to 3.0 x 10(4) in the near infrared region (938 nm). The spectral shift of WGM resonance as a function of temperature was monitored to calculate the sensitivity of device.