DSpace at KISTKIST Conference Paper2016

Highly efficient circular holes added a-Si: H grating coupler with metal mirror for 3D optical interconnects

Authors
Kang, JoonHyun; Kuno, Yuki; Ito, Kazuto; Hayashi, Yusuke; Arai, Shigehisa; Han, Il-Ki; Amemiya, Tomohiro; Nishiyama, Nobuhiko; Suzuki, Junichi
Issue Date
2016-07
Publisher
IEEE
Citation
21st International Optoelectronics and Communications Conference (OECC) / International Conference on Photonics in Switching (PS)
Abstract
A monolithically fabricated apodized a-Si: H grating coupler with metal mirror was demonstrated The minimum groove length for the apodized grating was more than 100 nm and measured coupling efficiency was 70%.
URI
https://pubs.kist.re.kr/handle/201004/114946
Appears in Collections:
KIST Conference Paper > 2016
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