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Effects of sputtering condition on the internal stress of permalloy thin films.

Title
Effects of sputtering condition on the internal stress of permalloy thin films.
Authors
김희중; 김현태; 한석희; 강일구; 김상주
Keywords
internal stress
Issue Date
1995-06
Publisher
Proceedings of the 2nd Pacific RIM international conference on advanced materials and processing.
Citation
, 1369-1374
URI
https://pubs.kist.re.kr/handle/201004/11604
Appears in Collections:
KIST Publication > Conference Paper
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