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EUV 리소그래피 기술의 역사적 발전과 미래전망

Authors

전영민

Issue Date

2021-07

Publisher

한국광학회

Citation

K-light, v.4, no.3, pp.40 - 46

Keywords

EUV; 리소그래피; 13.5nm; ASML

ISSN

2586-5110

URI

https://pubs.kist.re.kr/handle/201004/116709

Appears in Collections:

KIST Article > 2021

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