Co-firing of low- and middle permittivity dielectric tapes in low-temperature co-fired ceramics

Abstract

Compatibility in cofiring low-kappa and middle-kappa based on a same glass composition for the hybrid LTCC material systems was investigated. Designing of appropriate lithium borosilicate glass frit systems allowed us to develop an optimized glass frit system used for low-kappa and middle-kappa dielectric fillers, commonly. The effects of glass addition on the densification and electrical properties in low-kappa and middle-kappa dielectric materials were also examined. Controlling glass compositions and contents we tried to match low-kappa and middle-kappa tapes physically and chemically.