Optimal design of piezoelectric cantilever for a micro power generator with microbubble

Abstract

We propose a design method of piezoelectric cantilever to acquire maximum power from a micro power generation system, whose cantilever is pushed upward by microbubble and the deflected piezoelectric layer generates electric charges. We optimize geometric parameters for the maximum energy density by theoretical analysis. The optimal shapes are long and slender one for thick film cantilever and short and wide one as thin film one. We fabricated thick film cantilever and setup the experimental system.