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Implantation of N-ion on sapphire substrate for GaN epilayer

Authors

Park, YJ; Cho, YS; Koh, EK; Kim, EK; Kim, GG; Byun, DJ; Min, SK

Issue Date

2001

Publisher

JAPAN SOCIETY APPLIED PHYSICS

Citation

International Microprocesses and Nanotechnology Conference, pp.222 - 223

URI

https://pubs.kist.re.kr/handle/201004/117915

Appears in Collections:

KIST Conference Paper > 2001

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