The improvement of mechanical properties of aluminum nitride and alumina by 1 keV Ar+ ion irradiation in reactive gas environment
- Title
- The improvement of mechanical properties of aluminum nitride and alumina by 1 keV Ar+ ion irradiation in reactive gas environment
- Keywords
- XPS
- Issue Date
- 1996-01
- Publisher
- Mat. res. soc. symp. proc.
- Citation
- VOL 396, 261-265
- Appears in Collections:
- KIST Publication > Conference Paper
- Files in This Item:
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