Characterization of nanoporous Al2O3 films at terahertz frequencies

Abstract

Terahertz birefringence in nanoporous Al2O3 films grown on Al substrates is characterized nondestructively by polarization-resolved terahertz spectroscopy. Sparse deconvolution is used to find the film thicknesses from the data, showing good agreement with the values measured directly by destructive cross-sectional field-emission scanning electron microscopy. (C) 2020 Optical Society of America