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Applications of ion beam of a few keV for thin film growth and surface modification

Title
Applications of ion beam of a few keV for thin film growth and surface modification
Authors
고석근; 최원국; 장홍규; 윤영수; 송석균; 박성철; 조준식; 김기환; 정형진
Keywords
thin film
Issue Date
1996-03
Publisher
Ungyong Mulli (The Korean physical society)
Citation
VOL 9, NO 2, 199-206
URI
https://pubs.kist.re.kr/handle/201004/11869
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KIST Publication > Article
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