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전자선 증착된 실리콘 산화막 층을 이용한 직접 접합에 관한 연구 .

Title
전자선 증착된 실리콘 산화막 층을 이용한 직접 접합에 관한 연구 .
Authors
주병권; 박흥우; 이윤희; 정성재; 이남양; 고근하; M.R. Haskard; 박정호; 오명환
Keywords
MEMS
Issue Date
1996-07
Publisher
대한전기학회 하계학술대회 논문집
Citation
, 1988-1988
URI
https://pubs.kist.re.kr/handle/201004/11902
Appears in Collections:
KIST Publication > Conference Paper
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