The improvement of mechanical properties of aluminum nitride and alumina by 1 KeV Ar+ ion irradiation in reactive gas environment

Authors
Kon, SKSon, YBGam, JSKim, CJChoi, WKJung, HJ
Issue Date
1996
Publisher
MATERIALS RESEARCH SOC
Citation
Symposium on Ion-Solid Interactions for Materials Modification and Processing, v.396, pp.261 - 265
ISSN
0272-9172
URI
https://pubs.kist.re.kr/handle/201004/119052
Appears in Collections:
KIST Conference Paper > Others
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