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DEPENDENCE OF RESIDUAL-STRESS OF DIAMOND-LIKE CARBON-FILMS ON PRECURSOR GASES AND PROCESS PARAMETERS OF RF PACVD

Authors

LEE, KR; BAIK, YJ; EUN, KY

Issue Date

1993

Publisher

MATERIALS RESEARCH SOC

Citation

Symposium on Thin Films: Stresses and Mechanical Properties IV, at the 1993 Spring Meeting of the Materials-Research-Society, v.308, pp.101 - 106

ISSN

0272-9172

URI

https://pubs.kist.re.kr/handle/201004/119065

DOI

10.1557/PROC-308-101

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KIST Conference Paper > Others

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