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Comparison of properties of tin oxide films deposited by reactive-partially ionized beam, ion assisted, and hybrid ion beam methods

Title: Comparison of properties of tin oxide films deposited by reactive-partially ionized beam, ion assisted, and hybrid ion beam methods

Authors: 송석균; 최원국; H. K. Baik; 정형진; 고석근

Keywords: reactive ion-assisted reaction

Issue Date: 1997-01

Publisher: Nanostructured materials.

Citation: VOL 8, NO 4, 477-488

URI: https://pubs.kist.re.kr/handle/201004/11994

Appears in Collections:: KIST Publication > Article

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