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Surface smoothing of indium tin oxide film by laser-induced photochemical etching

Authors
Kang, JoonHyun; Kim, Young-Hwan; Kwon, Seok Joon; Park, Joon-Suh; Park, Kyoung Wan; Park, Jae-Gwan; Han, Il Ki
Issue Date
2017-12
Publisher
IOP PUBLISHING LTD
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS, v.56, no.12
Abstract
Surface smoothing of indium tin oxide (ITO) film by laser irradiation was demonstrated. The ITO surface was etched by choline radicals, which were activated by laser irradiation at a wavelength of 532nm. The RMS surface roughness was improved from 5.6 to 4.6 nm after 10 min of laser irradiation. We also showed the changes in the surface morphology of the ITO film with various irradiation powers and times. (C) 2017 The Japan Society of Applied Physics
Keywords
LIGHT-EMITTING DEVICES; THIN-FILMS; LIGHT-EMITTING DEVICES; THIN-FILMS; surface smoothing; dressed photon; laser-induced photochemical etching; Indium tin oxide
ISSN
0021-4922
URI
https://pubs.kist.re.kr/handle/201004/121990
DOI
10.7567/JJAP.56.128003
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KIST Article > 2017
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