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Crystallographic orientation dependence of carbon incorporationin to GaAs epilayers using CBr ₄ and CCl ₄

Title: Crystallographic orientation dependence of carbon incorporationin to GaAs epilayers using CBr ₄ and CCl ₄

Authors: 손창식; 김성일; 김용; 황성민; 박영균; 김은규; 민석기; 최인철

Keywords: carbon incorporation

Issue Date: 1997-04

Publisher: 한국물리학회 회보; Bulletin of the Korean physical society

Citation: VOL 15, NO 1, 174-174

URI: https://pubs.kist.re.kr/handle/201004/12218

Appears in Collections:: KIST Publication > Conference Paper

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