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The role of a thin amorphous silicon layer in the fabrication of micro-pored silicon

Title
The role of a thin amorphous silicon layer in the fabrication of micro-pored silicon
Authors
김은규; 이민석; 최원철; 이호녕; 민석기; 유종훈
Keywords
amorphous silicon; micro pored silicon; quantum size effect; PL; SEM; Nanostructures; Optical properties; Scanning electron microscopy
Issue Date
1997-06
Publisher
Thin solid films.
Citation
VOL 301, 188-191
URI
https://pubs.kist.re.kr/handle/201004/12255
Appears in Collections:
KIST Publication > Article
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