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Alicyclic polymers based on t-BOC-dinorbonene as resists materials

Title
Alicyclic polymers based on t-BOC-dinorbonene as resists materials
Authors
이재형; 강종희; 김종만; 이찬우; 한동근; 안광덕; 조의환; 구재선; 오승훈; 이상균; 문성윤; 강신이
Issue Date
1998-04
Publisher
한국고분자학회 , 서울 서강대 , 1998. 4. 10-11.
Citation
, 24-24
URI
https://pubs.kist.re.kr/handle/201004/12581
Appears in Collections:
KIST Publication > Conference Paper
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