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Crystallization and ferroelectric behavior of sputter deposited PZT using a target containing excess Pb and O contents

Title: Crystallization and ferroelectric behavior of sputter deposited PZT using a target containing excess Pb and O contents

Authors: 하순목; 김도현; 박형호; 김태송

Keywords: PZT; sputter deposition; excess Pb and O; substrate heating; ferroelectric properties

Issue Date: 1999-12

Publisher: Thin solid films

Citation: VOL 355-356, 525-530

URI: https://pubs.kist.re.kr/handle/201004/12952

ISSN: 0040-6090

Appears in Collections:: KIST Publication > Article

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