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Photoluminescence induced by Si-implantation into SiO₂ layers at elevated temperature

Title: Photoluminescence induced by Si-implantation into SiO₂ layers at elevated temperature

Authors: Hyo Bae Kim; Tae Gon Kim; Keun Hwa Chae; Chung Nam Whang; Jun Yong Jeong; Min Suk Oh; Seongil Im; 송종한

Keywords: photoluminescence; SiO₂; implantation

Issue Date: 1999-07

Publisher: Journal of the Korean Physical Society

Citation: VOL 35, S588-S590

URI: https://pubs.kist.re.kr/handle/201004/13164

ISSN: 0374-4884

Appears in Collections:: KIST Publication > Article

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