Dependence of Processing Parameters on Structural Properties and Microstructures of Pulsed Laser Deposited LiMn2O4 Thin Films

Abstract

LiMn2O4 thin films grown on a Pt/Ti/SiO2/Si(100) substrate by pulsed laser deposition were studied with focusing on the effects of growth parameters on crystallographic and structural characteristics. The growth parameters, namely oxygen pressure, target-substrate distance, laser energy density, pulse frequency and substrate temperature were established in a sequential manner to obtain smooth, dense and single-phase LiMn2O4 films. The smooth, dense LiMn2O4 single-phase thin films were found to show the improved cycle performance of cathode of thin film battery. (C) 2009 The Japan Society of Applied Physics