Spin coating nanopatterned multielemental materials via self-assembled nanotemplates

Authors
Xia, GuodongJeong, Seong-JunKim, Ji EunKim, Bong HoonKoo, Chong-MinKim, Sang Ouk
Issue Date
2009-06-03
Publisher
IOP PUBLISHING LTD
Citation
NANOTECHNOLOGY, v.20, no.22
Abstract
Spin coating of multicomponent precursor solutions was employed in conjunction with block copolymer nanotemplates to fabricate nanopatterned functional multielemental materials. Nanodot and nanowire arrays of several multielemental materials exhibiting optoelectronic and multiferroic properties have been fabricated on various substrates to demonstrate the versatility of our approach. The shape, size and density of nanopatterned multielemental materials can be tuned in a variety of ways. This low cost and large scale solution nanopatterning process without a harsh etching step may offer a new opportunity for development of ultrahigh density device nanostructures.
Keywords
BLOCK-COPOLYMER LITHOGRAPHY; THIN-FILM; ARRAYS; NANOSTRUCTURES; FABRICATION; SURFACE; OXIDE; GRAPHOEPITAXY; BLOCK-COPOLYMER LITHOGRAPHY; THIN-FILM; ARRAYS; NANOSTRUCTURES; FABRICATION; SURFACE; OXIDE; GRAPHOEPITAXY; nanopattern; selfassembly
ISSN
0957-4484
URI
https://pubs.kist.re.kr/handle/201004/132401
DOI
10.1088/0957-4484/20/22/225301
Appears in Collections:
KIST Article > 2009
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