Defect effect on tribological behavior of diamond-like carbon films deposited with hydrogen diluted benzene gas in aqueous environment

Authors
Yi, Jin WooPark, Se JunMoon, Myoung-WoonLee, Kwang-RyeolKim, Seock-Sam
Issue Date
2009-05-15
Publisher
ELSEVIER SCIENCE BV
Citation
APPLIED SURFACE SCIENCE, v.255, no.15, pp.7005 - 7011
Abstract
This study examined the friction and wear behavior of diamond-like carbon (DLC) films deposited from a radio frequency glow discharge using a hydrogen diluted benzene gas mixture. The DLC films were deposited on Si (1 0 0) and polished stainless steel substrates by radio frequency plasma-assisted chemical vapor deposition (r.f.-PACVD) at hydrogen to benzene ratios, or the hydrogen dilution ratio, ranging from 0 to 2.0. The wear test was carried out in both ambient and aqueous environments using a homemade ball-on-disk type wear rig. The stability of the DLC coating in an aqueous environment was improved by diluting the benzene precursor gas with hydrogen, suggesting that hydrogen dilution during the deposition of DLC films suppressed the initiation of defects in the film and improved the adhesion of the coating to the interface. (c) 2009 Elsevier B.V. All rights reserved.
Keywords
DLC FILM; BIOMEDICAL APPLICATIONS; AMORPHOUS-CARBON; ION-IMPLANTATION; STAINLESS-STEEL; COATINGS; BIOCOMPATIBILITY; MECHANISM; SILICON; DLC FILM; BIOMEDICAL APPLICATIONS; AMORPHOUS-CARBON; ION-IMPLANTATION; STAINLESS-STEEL; COATINGS; BIOCOMPATIBILITY; MECHANISM; SILICON; DLC; Hydrogen dilution; Aqueous environment; Spallation wear; Defect
ISSN
0169-4332
URI
https://pubs.kist.re.kr/handle/201004/132490
DOI
10.1016/j.apsusc.2009.03.031
Appears in Collections:
KIST Article > 2009
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