DSpace at KISTKIST Article2008

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dc.contributor.authorArvind Singh-
dc.contributor.authorPham Duc Cuong-
dc.contributor.author윤의성-
dc.date.accessioned2024-01-20T22:05:24Z-
dc.date.available2024-01-20T22:05:24Z-
dc.date.created2022-01-10-
dc.date.issued2008-12-
dc.identifier.issn1229-9189-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/132900-
dc.publisherThe Korean society of tribologists & lubrication engineers-
dc.titlePhotolithographic Silicon Patterns with Z-DOL (perfluoropolyether, PFPE) Coating as Tribological Surfaces for Miniaturized Devices-
dc.typeArticle-
dc.description.journalClass3-
dc.identifier.bibliographicCitationKSTLE: international journal / The Korean society of tribologists & lubrication engineers, v.9, no.1-2, pp.10 - 12-
dc.citation.titleKSTLE: international journal / The Korean society of tribologists & lubrication engineers-
dc.citation.volume9-
dc.citation.number1-2-
dc.citation.startPage10-
dc.citation.endPage12-
dc.subject.keywordAuthorsilicon-
dc.subject.keywordAuthormicro-
dc.subject.keywordAuthorpatterns-
dc.subject.keywordAuthorfriction-
dc.subject.keywordAuthortribology-
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KIST Article > 2008
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