Effects of UV-irradiation during photochemical metal-organic deposition on the electric and ferroelectric properties of direct-patternable Bi3.25La0.75Ti3O12 films

Abstract

The electric and ferroelectric properties of UV-irradiated and non-irradiated Bi3.25La0.75Ti3O12 (BIT) films prepared by photochemical metal-organic deposition using photosensitive precursors were characterized. Fourier transform infrared spectroscopy showed that complete removal of organic groups was possible through ultraviolet exposure of the spin-coated BLT precursor films at room temperature. The measured remnant polarization values of UV-irradiated and non-irradiated BLT films after annealing at 700 degrees C were 16.0 and 10.1 mu C/cm(2), respectively. The Process of UV-irradiation was effective for the enhancement of electric and ferroelectric properties, as well as direct-patterning to fabricate micro-patterned systems without dry etching. (C) 2008 Elsevier B.V. All rights reserved.