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The fabrication of microlens array

Title
The fabrication of microlens array
Authors
김희연; 문성욱
Keywords
microlens array; HNA; bulk etching; SU-8; fill fator; IR derector
Issue Date
2000-11
Publisher
한국센서학회
URI
https://pubs.kist.re.kr/handle/201004/13333
Appears in Collections:
KIST Publication > Conference Paper
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