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AIN 압전체를 이용한 suspended 압전박막공진기의 제조

Title
AIN 압전체를 이용한 suspended 압전박막공진기의 제조
Authors
주병권; 김현호; 이시형; 이전국; 오명환; 김수원
Issue Date
2000-11
Publisher
센서학회 종합학술대회
Citation
, ?.-?.
URI
https://pubs.kist.re.kr/handle/201004/13354
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KIST Publication > Conference Paper
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