폴리우레탄 감지막에 의한 표면탄성파 가스 센서의 감지능 향상

Abstract

This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such asethanol gas by measuring the phase shift of output signal. A delay-line with a center frequency of 400 MHz was fabricatedon 128o Y-Z LiNbO3 substrates. Experimental results, which showed the phase change of the output signal under theabsorption of volatile gas on sensor surface, were presented. The sensitivities of SAW delay lines coated with polyurethanefilms were greatly increased compared to those for uncoated devices. This SAW gas sensor system may be well suitedfor a high sensitivity electronic nose system.