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블록 공중합체 박막을 이용한 실리콘 나노점의 형성

Other Titles

Fabrication of Si Nano Dots by Using Diblock Copolymer Thin Film

Authors

강길범; 김성일; 김영환; 박민철; 김용태; 이창우

Issue Date

2007-06

Publisher

한국마이크로전자및패키징학회

Citation

마이크로전자 및 패키징학회지, v.14, no.2, pp.17 - 22

Keywords

diblock copolymer; copolymer lithography; reactive ion etching; Si nano dots; nanotemplate

ISSN

1226-9360

URI

https://pubs.kist.re.kr/handle/201004/134336

Appears in Collections:

KIST Article > 2007

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