Improvement of Hardness and Toughness of TiAlN Coating by Nanoscale Multilayered Structurization with Si3N4

Authors
Park, Jong-KeukZiebert, CarlosStueber, MichaelBaik, Young-Joon
Issue Date
2007-04
Publisher
WILEY-V C H VERLAG GMBH
Citation
PLASMA PROCESSES AND POLYMERS, v.4, pp.S902 - S905
Abstract
The Ti(Al)-Si based nitride coating material has been studied due to its excellent mechanical properties such as hardness and oxidation resistance as in the Ti(Al)N/a-Si3N4 nanocomposites with high hardness over 50 GPa. In this study, the effect of microstructure, especially layer thickness of TiAlN and Si3N4 phase, on the mechanical properties of the TiAlN/Si3N4 nanoscale multilayered coating has been investigated. By nanoscale multilayered structurization with a thin Si3N4 layer (similar to 0.3 nm), the hardness and toughness of TiAlN coating were greatly improved. It is known that for the TiAlN/Si3N4 nanoscale multilayered coatings, thickness of the Si3N4 layer is the most important factor and should be carefully controlled to obtain coatings with high hardness and toughness.
Keywords
hardness; nanolayers; silicon nitride; titanium aluminum nitride; toughness
ISSN
1612-8850
URI
https://pubs.kist.re.kr/handle/201004/134498
DOI
10.1002/ppap.200732202
Appears in Collections:
KIST Article > 2007
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