Formation of nitride film on amorphous ribbon using chemical vapor deposition

Authors
Han, Jun-HyunKim, Tae-HoonYoon, Jin-KookJee, Kwang-KooKim, Kwang-Yoon
Issue Date
2007-03-25
Publisher
ELSEVIER SCIENCE SA
Citation
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, v.449, pp.741 - 746
Abstract
Nitride film was deposited on amorphous ribbon using chemical vapor deposition (CVD) to increase skin resistivity of the amorphous ribbon. As-cast Fe73.5Si15.5B7Cu1Nb3 amorphous ribbon was heat-treated in NH3 atmosphere to deposit nitride film on the ribbon at temperatures ranging 773-873 K. The effect of not only NH3 atmosphere but also pre-existing thin oxide film on the surface of as-cast amorphous ribbon on the formation of nitride film was investigated. Thin nitride film of Fe-nitride and Si-nitride were created on the surface of ribbon through the nitriding process. (c) 2006 Elsevier B.V. All rights reserved.
Keywords
MAGNETIC-PROPERTIES; CRYSTALLIZATION; MAGNETIC-PROPERTIES; CRYSTALLIZATION; nitride; CVD (chemical vapor deposition); amorphous; magnetic core
ISSN
0921-5093
URI
https://pubs.kist.re.kr/handle/201004/134520
DOI
10.1016/j.msea.2006.02.321
Appears in Collections:
KIST Article > 2007
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