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Reliable design and electrical characteristics of vertical MEMS probe tip

Other Titles

수직형 MEMS 프로브 팁의 신뢰성 설계 및 전기적 특성평가

Authors

이승훈; 추성일; 김진혁; 한동철; 문성욱

Issue Date

2007-03

Publisher

한국신뢰성학회

Citation

한국신뢰성학회지: 신뢰성응용연구, v.7, no.1, pp.23 - 29

Keywords

reliable design; probe; MEMS; contact resistance

ISSN

1738-9895

URI

https://pubs.kist.re.kr/handle/201004/134552

Appears in Collections:

KIST Article > 2007

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