Effect of a Pt substrate on the growth and fabrication of ZnO Schottky diodes

Abstract

The growth of ZnO on Pt (111) and Pt(200) substrates by using pulsed laser deposition and the fabrication of a Schottky diode by using the underlying Pt substrate as a bottom electrode are described. The structural, optical, and electrical properties of the ZnO film were mainly affected by the orientation of the Pt substrate: Single-crystalline ZnO(002) on Pt(111), and polycrystalline on Pt(200) were identified using XRD measurements. The optical properties of ZnO on Pt(111) were superior to those on Pt(200), as assessed by PL intensity measurement. Furthermore, the rectifying characteristics of the fabricated Pt Schottky diode are critically influenced by the structure of the ZnO deposited on the Pt substrate.