The investigation of dielectric characteristics of (Ba,Sr)TiO3 thin films in millimeter wavelength range

Abstract

The microwave electrodeless measuring techniques for the determination of the characteristics of the ferroelectric (Ba, Sr)TiO3 thin films in the millimeter wavelength region were studied. The partialy filled cavity resonator based on the rectangular waveguide of Ka and V bands was theoretically and experimentally investigated. At the frequency around 90-100 GHz the technique of multiple signal reflections from the interface film/substrate was developed and implemented. As the result of microwave measurements of BST films the frequency dependence of dielectric loss factor was build up for the region 1-100 GHz, which had practically linear character.