Stress development of direct-patternable PZT film for applying to micro-detecting system

Authors
Bae, Sang WooKang, Ghi YuunPark, Hyung-HoKim, Tae-Song
Issue Date
2006-12
Publisher
SPRINGER
Citation
JOURNAL OF ELECTROCERAMICS, v.17, no.2-4, pp.805 - 809
Abstract
Direct-patternable lead zirconate titanate (PZT) film was prepared by sol-gel technique using orth-nitrobenzaldehyde as a photosensitive agent. For applying this direct-patternable PZT ferroelectric film to micro electromechanical system, a development of stress in the film was investigated by modifying the anneal condition and the constituents of PZT sol. The residual stress in the conventional and modified (for stress-release) direct-patternable PZT films was investigated by the Raman spectroscopy. In addition, ferroelectric properties of modified PZT film were compared with those of conventional film. Finally, we assess the applying feasibility of direct-patternable PZT film to micro-detecting system.
Keywords
THIN-FILMS; ULTRATHIN; THIN-FILMS; ULTRATHIN; direct-patterning; PZT; ferroelectric; residual stress; Raman spectroscopy
ISSN
1385-3449
URI
https://pubs.kist.re.kr/handle/201004/134892
DOI
10.1007/s10832-006-7238-8
Appears in Collections:
KIST Article > 2006
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE