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A study on C-axis preferred orientation of ZnO thin film at Ar/O2 gas ratios

Title
A study on C-axis preferred orientation of ZnO thin film at Ar/O2 gas ratios
Authors
이동윤; 박용욱; 남산; 이전국; 김현재; 윤석진; 황금찬
Keywords
ZnO thin film; RF magnetron sputtering; preferred orientation; resistivity; roughness; ZnO 박막; 고주파 마그네트론 스퍼터링; 우선 배향성; 비저항; 거칠기
Issue Date
2000-07
Publisher
전기전자재료학회논문지
Citation
VOL 13, NO 7, 617-624
URI
https://pubs.kist.re.kr/handle/201004/13573
ISSN
1226-7945
Appears in Collections:
KIST Publication > Article
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